Material Transport Robot for IC Fab —— Wafer Box/ FOUP Transporter / Handler


ATR500

APR500

APR500 Automatic Portage Robot can automatically carry two 12-inch FOUPs (compatible with 8-inch stortage boxes) to achieve automatic end-to-end handling. ATR500 Automatic Transportation Robot can be compatible with a variety of semiconductor factory materials, and can transport materials to multiple safety functions, espeically suitable for man- machine collaboration environment. A number of innovative technologies effectively improve the efficiency of the use of robots. 海南私彩网站 provides customized robots and the overall solution of material handling in Fabs.
   Product Features

● Flexible

● Applied to high class clean room

● Large Capacity

● Material traceability

● User friendly

● Safety

   Specifications

 Model

ATR500 

APR500 

Capacity

8-inch Storage Boxes × 12

12-inch FOUPs × 4

12-inch FOUPs × 2

Guiding Methods

 Laser Intelligent Guide

 Laser Intelligent Guide

 Speed

 Max. 1.5 m/s (Option)

 Max. 1.3 m/s (Option)