• 2002.03
    Founded in Zhangjiang Hi-tech Park.
  • 2006.04
    Registered trademark of lithography equipments was approved by SAIC.
  • 2008.11
    Acceptance of lithography under China 10th Five-Year Plan by Ministry of Science and Technology.
  • 2008.12
    Identified as High and New Technology Enterprises in Shanghai.
  • 2009.12
    Delivered the first advanced packaging stepper (SSB500/10A) to the customer.
  • 2010.08
    Identified as Innovative Enterprises in Shanghai.
  • 2011.10
    SSB500 series advanced packaging stepper was approved as National Key and New Product Planning Projects by Ministry of Science and Technology.


  • 2012.05
    SSB500 series stepper achieved initial overseas sales.
  • 2012.06
    SSB500 series advanced packaging stepper was awarded New Patented Products in Shanghai.
  • 2012.11
    SSB500 series advanced packaging stepper won the Gold Award of the 15th China International Industry Fair.
  • 2012.12
    Research project-Key Technology of Nano Precision Multi-freedom Motion System and Its Application won the 2nd Prize of National Technology Invention Award of 2012.
  • 2013.08
    The first domestic projection lithography SSB225/10 for 2.5G AM-OLED TFT was delivered to the customer and identified as National Key and New Product in 2014.
  • 2013.11
    Evaluated as the first batch of National Exemplary Enterprises of Intellectual Property Rights.
  • 2014.03
    Advanced packaging stepper team was selected as the Innovative Team in Key Fields for Innovative Talents Promotion Program of Ministry of Science and Technology.
  • 2014.10
    The innovative and research team won the Award of Advanced Collective of National Professional and Technical Talents.
  • 2016.01
    海南私彩网站 Technology Center was accredited as a National Enterprise Technology Center.
  • 2016.06
    Delivered China’s first IC front-end scanner to the customer.
  • 2016.11
    SSB245 high resolution projection lithography for flat panel display won the Gold Award of the 18th China International Industry Fair.
  • 2017.01
    Accomplished the joint-stock reform and was renamed officially as Shanghai Micro Electronics Equipment (Group) Co., Ltd.
  • 2017.03
    Key Technologies Development and Application of FPD High-precision Patterned Process and Equipment was awarded First Prize of Shanghai S&T Progress.
  • 2017.04
    Immersion Lithography Key Technologies Pre-research Program was officially accepted.
  • 2017.08
    Selected as one of the first seven “Shanghai Quality” pilot units to develop quality standards.
  • 2017.10
    90nm Step-and-Scan Lithography Demo passed onsite test by experts.
  • 2017.11
    SPA 200 Series Photo Alignment Equipment was awarded SILVER AWARD by the 19th Session China International Industry Fair.
  • 2017.12
    Delivered China’s first 6G high-resolution TFT lithography.
  • 2018.03
    90nm Step-and-Scan Lithography Project passed formal acceptance.
  • 2018.06
    SSB500 Stepper was certified “Shanghai Brand”. 海南私彩网站 is one of the first group of companies that have been certified.